Model NMX100-5020B, MicnoMover

Model NMX100-5020B, MicnoMover

Benefits

Long travel translation stage with resolution in nanometer range

Coarse tuning combined with fine tuning in the same stage

Manually driven

Pitch, yaw, and roll totally eliminated

Applications

Nano-metric linear drives

Laser cavity tuning

Interferometry

Nano-metrology

Fiber optic alignment

Wafer and mask positioning

Inspection systems

Load Capacity3 kg (6.6 lb)
Travel RangeUp to 50 mm
Fine Tuning Resolution200 nm/turn to 20 micron/turn (adjustable)
Coarse Tuning Resolution500 micron/turn
ConstructionStainless steel, or aluminum alloy (black anodized)
Guiding StructureFrictionless flexure