NANO POSITIONING LINEAR TRANSLATION STAGES

• Load Capacity: 3 kg (6.6 lb)
• Travel Range: Up to 50 mm
• Fine Tuning Resolution: 200 nm/turn to 20 micron/turn (adjustable)
• Coarse Tuning Resolution: 500 micron/turn
• Construction: stainless steel, or aluminum alloy (black anodized)
• Guiding Structure: Frictionless flexure

Features:

• Long travel linear translation stage with resolution in nanometer range
• Coarse tuning combined with fine tuning in the same stage
• Manually driven
• Pitch, yaw, and roll totally eliminated

Applications:

• Nano-metric linear drives
• Laser cavity tuning
• Interferometry
• Nano-metrology
• Fiber optic alignment
• Wafer and mask positioning
• Inspection systems
• Tool adjustments
• Wear compensation