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Nano Positioners

Nano Positioners

NANO POSITIONING LINEAR TRANSLATION STAGES

  • Load Capacity: 3 kg (6.6 lb)
  • Travel Range: Up to 50 mm
  • Fine Tuning Resolution: 200 nm/turn to 20 micron/turn (adjustable)
  • Coarse Tuning Resolution: 500 micron/turn
  • Construction: stainless steel, or aluminum alloy (black anodized)
  • Guiding Structure: Frictionless flexure

Features:

  • Long travel linear translation stage with resolution in nanometer range
  • Coarse tuning combined with fine tuning in the same stage
  • Manually driven
  • Pitch, yaw, and roll totally eliminated

Applications:

  • Nano-metric linear drives
  • Laser cavity tuning
  • Interferometry
  • Nano-metrology
  • Fiber optic alignment
  • Wafer and mask positioning
  • Inspection systems
  • Tool adjustments
  • Wear compensation

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